A burner for scrubbers

ABSTRACT

The present invention presents a burner for scrubbers equipped with the first nozzle that is in the shape of a pipe and that is equipped with the first main body, the second nozzle that is in the shape of a pipe and equipped with the second main body that is located to wrap the outer circumference of the aforementioned first main body, and the third nozzle that is in the shape of a pipe and that is equipped with the third main body located to wrap the outer circumference of the aforementioned second main body.

CROSS-REFERENCE OF RELATED APPLICATION

This application is a Section 371 National Stage Application of International Application No. PCT/IB2020/057564, filed Aug. 12, 2020, and published as WO 2021/033080 A1 on Feb. 25, 2021, the content of which is hereby incorporated by reference in its entirety and which claims priority of Korean Application No. 10-2019-0102247, filed Aug. 21, 2019.

FIELD

The present invention pertains to a burner installed on scrubbers that treat waste gas produced during electronic industrial processes.

BACKGROUND

Waste gas produced during electronic industrial processes such as the semiconductor production process, LCD production process, and OLED production process is composed of a mixture of VOC, PFC gas, moisture, and other foreign materials. The aforementioned waste gas is produced in large volume during the semiconductor etching process and during the chemical adsorption process, and contains gas that facilitates global warming. Also, the PPC gas contained in the aforementioned waste gas is known to be difficult to break down during treatment. The PFC gas contained in the aforementioned waste gas is treated by scrubbers that use the heating method, the adsorption method, and the plasma method.

The aforementioned heating method scrubber could include a burner that heats waste gas by producing flames, a reaction chamber attached to the lower part of the burner to carry out combustions and reactions to produce byproduct particles, and a water tank that is located at one side of the lower part of the reaction chamber to collect byproduct particles and aqueous waste gas. The aforementioned burner forms flames by using both supplied oxidizing agent and fuel, and breaks down waste gas by heating it. The aforementioned waste gas could differ in terms of type and volume of gas emitted depending on the process.

Therefore, it is necessary for the aforementioned burner to form appropriate flames depending on the type of waste gas in order to combust waste gas more efficiently.

The discussion above is merely provided for general background information and is not intended to be used as an aid in determining the scope of the claimed subject matter. The claimed subject matter is not limited to implementations that solve any or all disadvantages noted in the background.

SUMMARY

The purpose of the present invention is to provide a scrubber burner that can reduce the production of carbon monoxide and nitrogen oxide in the process of combusting waste gas.

The burner for scrubbers under the present invention includes the first nozzle equipped with the first main body that is in the shape of a pipe, the second nozzle equipped with the second main body to wrap the outer circumference of the aforementioned first main body, and the third nozzle equipped with the third body located to wrap around the outer circumference of the aforementioned second main body.

Additionally, with the burner for scrubbers under the present invention, the aforementioned first nozzle could spray oxidizing agents, the aforementioned second nozzle could spray fuel or mixed gas composed of fuel and an oxidizing agent, and the aforementioned third nozzle could spray oxidizing agents or mixed gas composed of fuel and oxidizing agents. Here, the oxidizing agent sprayed from the aforementioned first nozzle could differ from the oxidizing agent sprayed from the aforementioned third nozzle in terms of oxygen content.

Additionally, the scrubber burner under the present invention could be equipped with the first channel that is formed inside the aforementioned first main body and through which the oxidizing agent sprayed from the aforementioned first nozzle flows, the second channel that is formed between the outer circumference of the aforementioned first main body and the inner circumference of the aforementioned second main body and through which the fuel or mixed gas composed of fuel and oxidizing agents sprayed from the aforementioned second nozzle flows, and the third channel that is formed between the outer circumference of the second main body and the inner circumference of the third body and through which oxidizing agents or mixed gas composed of fuel and oxidizing agents flow.

Additionally, the burner for scrubbers under the present invention could be positioned so that the aforementioned first main body, the second main body, and the third body could have the same central axis.

Additionally, with the burner for scrubbers under the present invention, the lower ends of the aforementioned first main body, the second main body, and the third body could be located at the same height.

Additionally, with the burner for scrubbers under the present invention, the lower ends of the aforementioned first main body, second main body, and third body could be located at different heights.

Additionally, with the burner for scrubbers under the present invention, the lower end of the aforementioned first main body and the lower end of the aforementioned second main body could be located at the same height, and the lower end of the aforementioned third body could be located lower than the lower end of the aforementioned first main body and the lower end of the aforementioned second main body.

Additionally, the burner for scrubbers under the present invention could further include the first separation component that is located between the aforementioned first main body and the aforementioned second main body to maintain the separation distance between the aforementioned first main body and the aforementioned second main body, and the second separation component that is located between the aforementioned second main body and the aforementioned third body to maintain the separation distance between the aforementioned second main body and the aforementioned third body.

Additionally, the aforementioned first separation component and the second separation component could be composed of perforated materials.

Depending on the type of waste gas, the burner for scrubbers under the present invention could improve flame stability by changing the type of oxidizing agent supplied to the first nozzle that is positioned inside and the type of oxidizing agent supplied to the third nozzle located at the outer side and reduce the production of carbon monoxide and nitrogen oxide emitted.

Additionally, with the burner for scrubbers under the present invention, due to the fact that the end of the third nozzle located at the outer side protrudes downward more than the nozzle that is located inside, instability of the flame caused by the waste gas flowing into the flame can be prevented.

Additionally, with the burner for scrubbers under the present invention, by using a corrosion resistant material for the third nozzle located at the outer side, it is possible to prevent corrosion by waste gas.

Additionally, with the burner for scrubbers under the present invention, due to the fact that the separation component composed of a perforated material supports the nozzles, the space between the nozzles is maintained consistently, so that fuel and oxidizing agents are supplied consistently and flames can be formed consistently.

The Summary is provided to introduce a selection of concepts in a simplified form that are further described in the Detailed Description. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a vertical cross-sectional diagram of the burner for scrubbers in accordance with an embodiment of the present invention.

FIG. 2 is a horizontal cross-sectional diagram for A-A of FIG. 1.

FIG. 3 is a horizontal cross-sectional diagram for B-B of FIG. 1.

FIG. 4 is a vertical cross-sectional diagram for the burner for scrubbers in accordance with another embodiment of the present invention.

FIG. 5 is a partial vertical cross-sectional diagram of a scrubber installed with the burner for scrubbers in accordance with an embodiment of the present invention.

DETAILED DESCRIPTION

Below, the burner for scrubbers in accordance with an embodiment of the present invention will be described in detail by referring to the attached drawings and the embodiment.

First, the burner for scrubbers in according with the embodiments of the present invention will be described.

FIG. 1 is a vertical cross-sectional diagram of the burner for scrubbers in accordance with an embodiment of the present invention. FIG. 2 is a horizontal cross-sectional diagram for A-A of FIG. 1. FIG. 3 is a horizontal cross-sectional diagram for B-B of FIG. 1. FIG. 4 is a vertical cross-sectional diagram of the burner for scrubbers in accordance with another embodiment of the present invention.

The burner (10) for scrubbers in accordance with an embodiment of the present invention includes the first nozzle (110), the second nozzle (120), and the third nozzle (130), when we refer to FIG. 1 to FIG. 3. The aforementioned burner (10) for scrubbers could further include the first separation component (140) and the second separation component (150). The aforementioned burner (10) for scrubbers could be formed in the shape of triple pipe with the first nozzle (110), the second nozzle (120), and the third nozzle (130) having the same central axis. The aforementioned burner (10) for scrubbers is installed with a scrubber to treat waste gas produced by the semiconductor process to be able to combust waste gas.

The aforementioned burner (10) for scrubbers could selectively spray fuel and oxidizing agents from the first nozzle (110), the second nozzle (120), and the third nozzle (130) depending on the type of the waste gas being treated. For example, the aforementioned first nozzle (110) could spray an oxidizing agent, the second nozzle (120) could spray fuel, and the third nozzle (130) could spray an oxidizing agent. Additionally, the oxygen content of the oxidizing agent sprayed by the aforementioned first nozzle and the oxygen content of the oxidizing agent sprayed by the third nozzle could be different. For example, the oxygen content of the oxidizing agent sprayed from the aforementioned first nozzle (110) could be more than the oxygen content of the oxidizing agent sprayed from the third nozzle (130). In such a case, the aforementioned burner (10) for scrubbers could form flames stably at the inner side with the oxidizing agent sprayed by the first nozzle (110) as the fuel sprayed by the second nozzle (120) expands. Additionally, the aforementioned burner (10) for scrubbers is able to keep flames stably with the oxidizing agent sprayed by the third nozzle (130). Additionally, the oxygen content of the oxidizing agent sprayed by the aforementioned first nozzle could be relatively less than the oxygen content of the oxidizing agent sprayed by the third nozzle.

Additionally, the aforementioned first nozzle (110) could spray oxidizing agents, and the aforementioned second nozzle (120) and the aforementioned third nozzle (130) could spray fuel. In such a case, with the aforementioned burner (10) for scrubbers the oxidizing agent sprayed by the first nozzle (110) and fuel sprayed by the second nozzle (120) and the third nozzle (130) come into contact to form flames. Especially, the aforementioned burner (10) for scrubbers is able to form stable flames at the relatively inner side as fuel expands in the direction of the oxidizing agent that is sprayed at the inner side.

Additionally, the aforementioned first nozzle (110) could spray an oxidizing agent, and the second nozzle (120) and the third nozzle (130) could spray fuel and oxidizing agents after mixing them. Additionally, the aforementioned first nozzle (110) and the third nozzle (130) could spray oxidizing agents, and the second nozzle (120) could mix fuel and oxidizing agents and spray them. In such a case, with the aforementioned burner (10) for scrubbers it is possible to reduce the production of nitrogen oxides due to the fact that part of fuel is mixed with an oxidizing agent in advance before being sprayed.

For the aforementioned oxidizing agent, oxygen, CDA, air, oxygen+air, oxygen+CDA, oxygen+nitrogen, CDA+nitrogen, air+nitrogen, or oxygen+air+nitrogen could be used. Additionally, for the aforementioned fuel, hydrogen (H₂), methane (CH₄), propane (C₃H₈), natural gas (CH4+C₃H₈+etc.) could be used. Additionally, for the aforementioned fuel all types of hydrocarbon fuel (C_(n)H_(m)) could be used.

In the description below, the inside, inner side, or inner circumference refers to the direction or side toward the central axis of the first nozzle (110) in FIG. 1, and the outside, outer side, or outer circumference refers to the opposing direction or side. Additionally, the upper side or top refers to the direction or side toward the upper part in FIG. 1, and the lower side or bottom refers to the direction or side toward the lower part in FIG. 1.

The aforementioned first nozzle (110) could include the first main body (111) and the first supply pipe (113). The aforementioned first nozzle (110) could be located at the innermost side of the burner (10) for scrubbers. The aforementioned first nozzle (110) could spray oxidizing agents. The aforementioned first nozzle (110) could form the first channel (110 a) through which oxidizing agents flow.

The aforementioned first main body (111) could be formed in the shape of a pipe with the upper part and the lower part opened. The aforementioned first main body (111) could have the first channel (110 a) formed inside. The aforementioned first main body (111) could have the first inner diameter, the first outer diameter, and the first height. The aforementioned first main body (111)'s upper part and lower part could have the same first inner diameter. Additionally, the aforementioned first main body (111) could have the same first diameter at the upper part and the lower part. Namely, the aforementioned first main body (111) could be formed in the shape of a straight-line pipe. The aforementioned first inner diameter could be determined with appropriate diameter according to the amount of the oxidizing agent sprayed. Namely, the aforementioned first inner diameter could be determined as the diameter that corresponds to the horizontal cross-sectional area of the first channel (110 a) necessary for oxidizing agents to flow.

With the aforementioned first main body (111), the first outer diameter is determined depending on the necessary level of strength and level of heat resistance, and could be formed with appropriate thickness. The aforementioned first height could be determined appropriately depending on the structure of the scrubber on which the burner (10) for scrubbers is installed. The aforementioned first main body (111) could be formed in such a way that the lower is composed of a flat surface. The aforementioned first main body (111) could be composed of a corrosion resistant metallic material such as stainless steel. The aforementioned first main body (111) could come into contact with such materials as F and Cl, and could be composed of a corrosion resistant material.

The aforementioned first supply pipe (113) could be a pipe with the same inner diameter as that of the first main body (111). The aforementioned first supply pipe (113) could be formed as straight line or curve depending on the location where the burner (10) for scrubbers is formed. The lower end of the aforementioned first supply pipe (113) is connected with the upper end of the first main body (111), and supplies the oxidizing agent supplied from outside to the first main body (111).

The aforementioned second nozzle (120) could include the second main body (121), the second sealing ring (122), and the second supply pipe (123). The aforementioned second nozzle (120) could be located at the outer side of the first nozzle (110) at the burner (10) for scrubbers. The aforementioned second nozzle (120) could form the second channel (120 a) through which either fuel or oxidizing agents or both could flow. The aforementioned second nozzle (120) could spray only fuel of mixed gas composed of fuel and an oxidizing agent.

The aforementioned second main body (121) could be formed in the shape of a pipe with the upper part and the lower part opened. The aforementioned second main body (121) could have the second inner diameter, the second outer diameter, and the second height. The aforementioned second main body (121) could have the same second inner diameter for the upper part and the lower part. Additionally, the aforementioned second main body (121) could have the same outer diameter for the upper part and the lower part. Namely, the aforementioned second main body (121) could be formed in the shape of a straight-line pipe. The aforementioned second diameter could be larger than the first outer diameter of the first main body (111).

The aforementioned second main body (121) could be located at the outer side of the first main body (111) so that the central axis is located the same as the central axis of the first main body (111). For example, the aforementioned second main body (121) could be combined with the first main body (111) in order to form a concentric circle with the first main body (111) with a horizontal cross-section as the reference point. The aforementioned second main body (121) could be located to entirely wrap the outer circumference of the first main body (111) in order to form the second channel (120 a). Namely, the aforementioned first main body (111) could be inserted into the inside of the aforementioned second main body (121). Additionally, the aforementioned second channel (120 a) could be formed with the space between the outer circumference of the first main body (111) and the inner circumference of the second main body (121). Therefore, the aforementioned second inner diameter could be determined appropriately depending on the amount of fuel or mixed gas sprayed and depending on the outer diameter of the first main body (111). Namely, the aforementioned second inner diameter could be determined by the horizontal cross-sectional area of the second channel (120 a) and the first outer diameter. The aforementioned second channel (120 a) provides a channel through which the fuel or mixed gas composed of fuel and an oxidizing agent sprayed by the second nozzle (120) flows.

Additionally, the aforementioned second height could be determined appropriately according to the structure of the scrubber on which the burner (10) for scrubbers is installed. The aforementioned second height could be lower than the first height of the first main body (111). The aforementioned second main body (121) could be formed in such a way that the lower end is composed of a flat surface. Additionally, the aforementioned second main body (121) could be combined with the first main body (111) so that the lower end is located at the height that is identical to the height of the lower end of the first main body (111). Therefore, the upper end of the aforementioned second main body (121) could be located at a location that is lower than the location of the upper end of the first main body (111). The second outer diameter of the aforementioned second main body (121) is determined depending on the necessary level of strength and level of heat resistance, and could be formed with appropriate thickness. The aforementioned second main body (121) could be formed with a corrosion resistant metallic material such as stainless steel. Due to the fact that the aforementioned second main body (121) could come into contact with such materials as F and Cl, it could be formed with a corrosion resistant material.

The aforementioned second sealing ring (122) could include the second penetration hole (122 a). The aforementioned second sealing ring (122) could be formed in a plate shape with the diameter that corresponds to the second inner diameter or second outer diameter of the second main body (121). The aforementioned second penetration hole (122 a) could be formed with a diameter that corresponds to the first outer diameter of the first main body (111). The aforementioned second sealing ring (122) seals the upper end of the second main body (121) and provides a channel into which the first main body (111) is inserted. The aforementioned first main body (111) is inserted to the inner side of the second main body (121) through the second penetration hole (122 a) to be combined.

The aforementioned second supply pipe (123) could be a pipe with a certain inner diameter. With the aforementioned second supply pipe (123), one end could be combined with the upper part of the second main body (121) in order to be connected with the second channel (120 a). The aforementioned second supply pipe (123) could form a straight line or curve depending on the location where the burner (10) for scrubbers is formed. The aforementioned second supply pipe (123) supplies to the second main body (121) fuel or mixed gas supplied from outside.

The aforementioned third nozzle (130) could include the third main body (131), the third sealing ring (132), and the third supply pipe (133). The third nozzle could be located at the outer side of the second nozzle (120) on the burner (10) for scrubbers. The aforementioned third nozzle (130) could form the third channel (130 a) through which at least one of fuel and an oxidizing agent flows. The aforementioned third nozzle (130) could spray only fuel or could spray mixed gas composed of fuel and an oxidizing agent.

The aforementioned third main body (131) could be formed in the shape of a pipe with the upper part and the lower part opened. The aforementioned third main body (131) could have the third inner diameter, the third outer diameter, and the third height. The aforementioned third main body (131) could have the same inner diameter at the upper part and the lower part. Additionally, the aforementioned third main body (131) could have the same outer diameter at the upper part and the lower part. Namely, the aforementioned third main body (131) could be formed in the shape of a straight-line pipe. The aforementioned third inner diameter could be larger than the outer diameter of the second main body (121). The aforementioned third main body (131) could be positioned at the outer side of the second main body (121) in order for its axis to be located at the same location as the central axis of the first main body (111). For example, the aforementioned second main body (121) could be inserted into the inner side of the third main body (131). Additionally, the aforementioned third main body (131) could be combined with the second main body (121) in order to form a concentric circle with the first main body (111) and the second main body (121) with the horizontal cross-section as the reference point.

The aforementioned third main body (131)'s inner circumference could be positioned to wrap the entire outer circumference of the second main body (121) to form the third channel (130 a). The aforementioned third channel (130 a) could be formed as space between the outer circumference of the second main body (121) and the inner circumference of the third main body (131). Therefore, the aforementioned third inner diameter could be determined appropriate according to the amount of fuel or mixed gas sprayed and according to the outer diameter of the second main body (121). Namely, the third diameter could be determined according to the horizontal cross-section area of the third channel (130 a) and the second outer diameter. The aforementioned third channel (130 a) provides a channel through which an oxidizing agent or mixed gas composed of fuel and an oxidizing agent sprayed by the third nozzle (130) flows.

Additionally, the aforementioned third height could be determined appropriately according to the structure of the scrubber on which the burner (10) for scrubbers is installed. The aforementioned third height could be lower than the second height of the second main body (121). The aforementioned third main body (131) could be formed in such a way that the lower end forms a flat surface. Additionally, the aforementioned third main body (131) could be combined with the second main body (121) so that the lower end has the same height as the lower end of the first main body (111) and the lower end of the second main body (121). The aforementioned third main body (131) could be located lower than the upper end of the second main body (121).

On the other hand, according to another embodiment, when we refer to FIG. 4, the aforementioned third main body (131)'s lower end could be lower than the lower end of the first main body (111) and the lower end of the second main body (121). At this time, the aforementioned first main body (111) and the second main body (121) could be located at the same height. The aforementioned third main body (131) could intercept the inflow of waste gas to the area where flames are formed by wrapping the outer side of the flames formed. Therefore, the aforementioned burner (10) for scrubbers could prevent the flame from being extinguished by the waste gas supplied in the semiconductor process. Especially, even in the case in which substantial amount of nitrogen is contained in the waste gas supplied in the aforementioned semiconductor process, extinguishment of flames could be prevented.

Additionally, although not illustrated specifically, the aforementioned burner (10) for scrubbers could have different heights for the lower ends of the first main body (111), the second main body (121), and the third main body (131) to increase combustion efficiency by mixing fuel and an oxidizing agent in advance or increase combustion efficiency by reverse expansion of fuel.

The third outer diameter of the aforementioned third main body (131) is determined according to the necessary level of strength and heat resistance, and the third main body could be formed with appropriate thickness. The aforementioned third main body (131) could be formed with a corrosion resistant metallic material such as stainless steel. The aforementioned third main body (131) could be formed with a corrosion resistant material since it could come in contact with such materials as F and Cl.

The aforementioned third sealing ring (132) could include the third penetration hole (132 a). The aforementioned third sealing ring (132) could be formed with a plate with the diameter that corresponds with the third inner diameter or third outer diameter of the third main body (131). The aforementioned third penetration hole (132 a) could be formed with a diameter that corresponds to the second outer diameter of the second main body (121). The aforementioned third sealing ring (132) provides a channel through which the second main body (121) is inserted while sealing the upper end of the third main body (131). The aforementioned second main body (121) is inserted into the inner side of the third main body (131) through the third penetration hole (132 a).

The aforementioned third supply pipe (133) could be formed as a pipe with certain inner diameter. One end of the aforementioned third supply pipe (133) could be connected to the third channel (130 a) while combining with the upper part of the third main body (131). The aforementioned third supply pipe (133) could be formed as straight-line or curve depending on the location where the burner (10) for scrubbers is formed. The aforementioned third supply pipe (133) supplies to the third main body (131) fuel or mixed gas supplied from outside.

The aforementioned first separation component (140) is in the shape of a block, bar, or plate, and could be formed with the length or width that corresponds to the distance between the first main body (111) and the second main body (121). The aforementioned first separation component (140) could be formed in the length that corresponds to the distance between the outer diameter of the first main body (111) and the outer diameter of the second main body (121). In such a case, the aforementioned first separation component (140)'s inner end could come into contact with the outer circumference of the first main body (111), and the outer end could be combined so that the outer end is exposed to the outer circumference by penetrating the second main body (121). Additionally, the aforementioned first separation component (140) could be formed in the length that corresponds to the distance between the outer diameter of the first main body (111) and the inner diameter of the second main body (121). In such a case, the inner end of the aforementioned first separation component (140) could come into contact with the outer circumference of the first main body (111), its outer end could come into contact with the inner circumference of the second main body (121). The inner end of the aforementioned first separation component (140) could be in the shape of an arc corresponding to the outer diameter or inner diameter of the first main body (111), and the outer end could be formed in the shape of an arc corresponding to the inner diameter or outer diameter of the second main body (121).

The aforementioned first separation component (140) could be formed with a perforated material. For example, the aforementioned first separation component (140) could be composed of such materials as a perforated plate, beads, perforated foams, a sintering plate, metallic fibers, and packed beds.

One or more of the aforementioned first separation component (140) could be located by being separated according to the height direction of the first main body (111). Additionally, at least two of the aforementioned first separation component (140) could be located by being separated from each other along the circumference direction of the first main body (111). The aforementioned first separation component (140) maintains the separation distance between the first main body (111) and the second main body (121) by supporting the first main body (111) and the second main body (121). More specifically, the aforementioned first separation component (140)'s inner side and outer side are combined with the first main body (111) and the second main body (121), respectively, so that the space between the outer circumference of the first main body (111) and the inner circumference of the second main body (121) is kept consistent.

The aforementioned second separation component (150) is in the shape of a block, bar, or plate, and could be formed in length or width that corresponds to the distance between the second main body (121) and the third main body (131). The aforementioned second separation component (150) could be formed in length that corresponds to the distance between the outer diameter of the second main body (121) and the outer diameter of the third main body (131). In such a case, the aforementioned second separation component (150) could be combined in such a way that its inner side end comes into contact with the outer circumference of the second main body (121), and that the outer side end penetrates the third main body (131) and is exposed to the outer circumference. Additionally, the aforementioned second separation component (150) could be formed in length that corresponds to the distance between the outer diameter of the second main body (121) and the inner diameter of the third main body (131). In such a case, the aforementioned second separation component (150)'s inner side end could come into contact with the outer circumference of the second main body (121), and outer side end could come into contact with the inner circumference of the third main body (131). The aforementioned second separation component (150)'s inner side end could be formed in the shape of an arc that corresponds to the outer diameter or inner diameter of the second main body (121), and the outer side end could be formed in the shape of an arc that corresponds to the inner diameter or outer diameter of the third main body (131).

The aforementioned second separation component (150) could be formed with a perforated material. For example, the aforementioned second separation component (150) could be formed with such materials as a perforated plate, beads, perforated foams, a sintering plate, metal fibers, and packed beds.

One or more of the aforementioned second separation components (150) could be located by being separated along the height direction of the second main body (121). Additionally, at least two of the aforementioned second separation components (150) could be located separate from each other along the circumference direction of the second main body (121). The aforementioned second separation component (150) maintains the separation distance between the second main body (121) and the third main body (131) by supporting the second main body (121) and the third main body (131). More specifically, the aforementioned separation component (150)'s inner side and outer side are combined with the second main body (121) and the third main body (131), respectively, to keep constant the distance between the outer circumference of the second main body (121) and the inner circumference of the third main body (131).

The aforementioned burner (10) for scrubbers could be combined in such a way that the first main body (111), the second main body (121), and the third main body (131) can be separated from each other. For example, the second sealing ring (122) of the aforementioned second main body (121) could be combined to the outer circumference of the first main body (111) in such a way as to be separable. Additionally, the third sealing ring (132) of the aforementioned third main body (131) could be combined with the outer circumference of the second main body (121) to be separable. Additionally, the aforementioned first separation component (140) and the aforementioned second separation component (150) could be combined with the first main body (111) and the second body (121) or with the second main body and the third main body (131), respectively. Therefore, in the event that any one main body of the aforementioned burner (10) for scrubbers becomes severely corroded, it is possible to reduce the overall maintenance cost just by replacing the applicable main body.

Additionally, the aforementioned burner (10) for scrubbers can form partial oxidizing flames under the condition of fuel rich combustion by adjusting the oxidizing agents sprayed from the first nozzle (110) and the third nozzle (130). Therefore, the aforementioned burner (10) for scrubbers can increase NF₃ and CF₄ DRE (%) by using the hydrogen radicals produced by partial oxidized flames.

Additionally, the aforementioned burner (10) for scrubbers can increase the DRE (%) of the PFCs gas by adjusting the temperature and strength of the flame by differentiating the types of oxidizing agents sprayed from the first nozzle (110) and the second nozzle (120) depending on the type of waste gas emitted by the semiconductor production process, for example the type of PFCs gas.

Additionally, it is possible for the aforementioned burner (10) for scrubbers to reduce the amount of carbon monoxide and the amount of nitrogen oxide emitted during the combustion process by using mixed gas with reduced amount of oxygen or nitrogen for the oxidizing agent sprayed from the first nozzle (110) or third nozzle (130).

A scrubber on which the burner for scrubbers in accordance with an embodiment of the present invention is installed will be described summarily.

FIG. 5 is a partial vertical cross-sectional diagram of the scrubber part on which the burner for scrubbers in accordance with an embodiment of the present invention is installed.

The aforementioned scrubber could be formed by including a burner (10), a housing (20), and a waste gas inflow pipe (30). The aforementioned scrubber is capable of treating waste gas emitted from the semiconductor production process. The aforementioned scrubber's housing (20) and waste gas inflow pipe (30) could be formed in diverse structures, and the structure illustrated in FIG. 5 is an illustrative structure.

Although the aforementioned scrubber was not illustrated, it could be located at the lower part of the housing (20) and could further include a combustion chamber that combusts waste gas and a water tank.

Since the aforementioned housing (20) and the aforementioned waste gas inflow pipe (30) are in general structures used by scrubbers, specific descriptions will be omitted here.

The aforementioned burner (10) for scrubbers could be formed as the burner (10) for scrubbers in accordance with FIG. 1 to FIG. 4 described above.

When flames are formed in the burner (10) for scrubbers, the aforementioned scrubber is capable of combusting waste gas by bringing in waste gas through the waste gas inflow pipe (30). At this time, the waste gas flowing in from the aforementioned waste gas inflow pipe (30) could be combusted by being heated after coming into contact with flames.

The aforementioned description is merely an embodiment to embody the burner for scrubbers in accordance with the present invention. The present invention is not limited by the aforementioned embodiment. As claimed in the claims section below, the scope in which those with ordinary level of knowledge in the field in which the present invention belongs are able to make various changes without deviating from the gist of the present invention is encompassed by the technological spirit of the present invention.

Although elements have been shown or described as separate embodiments above, portions of each embodiment may be combined with all or part of other embodiments described above.

Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are described as example forms of implementing the claims. 

1. A burner for scrubbers equipped with the first nozzle that is in the shape of a pipe and that is equipped with the first main body, the second nozzle that is in the shape of a pipe and equipped with the second main body that is located to wrap the outer circumference of the aforementioned first main body, and the third nozzle that is in the shape of a pipe and that is equipped with the third main body located to wrap the outer circumference of the aforementioned second main body.
 2. The burner for scrubbers according to claim 1, wherein the aforementioned first nozzle sprays oxidizing agents, the aforementioned second nozzle sprays fuel or mixed gas composed of fuel and an oxidizing agent, and the aforementioned third nozzle sprays an oxidizing agent or mixed gas composed of fuel and an oxidizing agent.
 3. The burner for scrubbers according to claim 2, wherein the oxidizing agent sprayed from the aforementioned first nozzle is different from the oxidizing agent sprayed from the aforementioned third nozzle in terms of oxygen content.
 4. The burner for scrubbers of claim 2 that is equipped with the first channel that is formed inside the aforementioned main body and through which the oxidizing agent sprayed from the aforementioned first nozzle flows, the second channel formed between the outer circumference of the aforementioned first main body and the inner circumference of the second main body and through which the fuel or mixed gas composed of fuel and an oxidizing agent sprayed from the aforementioned second nozzle flows, and the third channel formed between the outer circumference of the second main body and the inner circumference of the third main body and through which the oxidizing agent or mixed gas composed of fuel and an oxidizing agent sprayed from the aforementioned third nozzle flows, and the third channel that is formed between the outer circumference of the second main body and the inner circumference of the third main body and through which the oxidizing agent or mixed gas composed of fuel and an oxidizing agent sprayed from the aforementioned third nozzle flows.
 5. The burner for scrubbers according to claim 1, wherein the aforementioned first main body, second main body, and third main body are positioned to have the same central axis.
 6. The burner for scrubbers according to claim 1, wherein the lower ends of the aforementioned first main body, second main body, and third main body have the same height.
 7. The burner for scrubbers according to claim 1, wherein the lower ends of the aforementioned first main body, second main body, and third main body are located at different heights.
 8. The burner for scrubbers according to claim 1, wherein the lower ends of the aforementioned first main body and second main body are located at the same height, and wherein the lower end of the aforementioned third main body is located lower than the lower ends of the aforementioned first main body and the aforementioned second main body.
 9. The burner for scrubbers of claim 1 that includes the first separation component that is located between the aforementioned first main body and the second main body to keep the separation distance between the aforementioned first main body and second main body, and the second separation component that is located between the aforementioned second main body and the third main body to keep the separation distance between the aforementioned second main body and the third main body.
 10. The burner for scrubbers according to claim 9, wherein the aforementioned first separation component and the second separation component are composed of perforated materials. 